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Microsense SF6-Air leakage

Microsense SF6-Air leakage

Microsense Profilometer. Total epi thickness (micron) 0.6 ~ 2.5 or customized. PL. Dislocation density (/cm2) ≤ 108. XRD. XRD Rocking Curve (004) ≤ 200 arc sec (102) ≤ 250 arc sec. XRD. Epi sheet resistance (Rsh) 225 ~ 450 Ω/sq or customized. Lehighton. Rsh uniformity. Rsh Stdev. ≤ 2%. Lehighton. Carrier concentration (/cm2) 0.8 ~ 1.1 ...

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  • Customized GaN-on-SiC Epitaxial Wafers, 100mm and

    Microsense Profilometer. Total epi thickness (micron) 0.6 ~ 2.5 or customized. PL. Dislocation density (/cm2) ≤ 108. XRD. XRD Rocking Curve (004) ≤ 200 arc sec (102) ≤ 250 arc sec. XRD. Epi sheet resistance (Rsh) 225 ~ 450 Ω/sq or customized. Lehighton. Rsh uniformity. Rsh Stdev. ≤ 2%. Lehighton. Carrier concentration (/cm2) 0.8 ~ 1.1

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