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2014-5-11The etching of gold is a key enabling technology in the fabrication of many microdevices and is widely used in the electronic, optoelectronic and microelectromechanical systems (MEMS) industries. In this review, we examine some of the available methods for patterning gold thin films using dry and wet etching techniques. Dry methods which utilise reactive ion etching (RIE) have a number of ...

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  • CF4 plasma etching of materials used in microelectronics

    2000-3-1Modern exposure tools and highly sensitive photoresists allow to generate micrometer and submicrometer pattern sizes. It is known that wet etching presents several critical problems in pattern transfer for such fine geometries (photoresists can lose adhesion, alteration in pattern size can occur because of overetching, the access of the etchCited by: 18

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  • Etch - Lam Research

    2016-11-14The semiconductor industry has long relied on the development of innovative device architectures and technologies to… New Corvus Technology Takes Uniformity Control to the Edge Posted on August 7, 2017 March 2, 2018

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  • Protocol for Measurement of Tetrafluoromethane (CF4)

    2016-2-11management tool that helps companies evaluate emissions, set goals and develop strategies for reducing emissions. The understanding that is developed from measurements of PFC emissions at individual facilities can be the basis for a well-formulated process improvement plan. Accurate inventories of PFC emissions are

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  • NASA Technical Reports Server (NTRS)

    2020-12-16Rapid SAW Sensor Development Tools The lack of integrated design tools for Surface Acoustic Wave (SAW) devices has led us to develop tools for the design, modeling, analysis, and automatic layout generation of SAW devices. These tools enable rapid development of wireless SAW sensors. The tools developed have been designed to integrate into existing Electronic Design Automation (EDA) tools

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  • Separation of CF4 and C2F6 from a perfluorocompound

    A process for separating at least one of CF4 and C2F6 from a gas. The process includes the steps of: (a) contacting a gas mixture comprising (i) at least one of CF4 and C2F6, (ii) at least one of NF3, CHF3, and N2, and (iii) SF6 with a membrane at conditions effective to obtain a retentate stream rich in SF6 and at least one of CF4 and C2F6, and a permeate stream rich in at least one of NF3

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  • Carbon etching with a high density plasma etcher

    2005-7-1A second chemistry was considered in parallel development. This gas combination was HBr/O 2 /Ar, a fairly common chemistry for etching Barc layers. Superior profiles were immediately seen with this chemistry ().However, once again there was a tendency to undercut SiON and the profile would be lost during extended over-etching and particularly, if thicker carbon stacks had to be etched (seen

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  • Whatman CF4 dipstick pad and papers | Cytiva, formerly GE

    Whatman CF4 dipstick pad and papers. CF4 is a medium weight, 100% cotton linter material (482 µm thickness at 53 kPA), suitable for use as a sample and absorption pad

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  • Gold etching for microfabrication | SpringerLink

    2014-5-11The etching of gold is a key enabling technology in the fabrication of many microdevices and is widely used in the electronic, optoelectronic and microelectromechanical systems (MEMS) industries. In this review, we examine some of the available methods for patterning gold thin films using dry and wet etching techniques. Dry methods which utilise reactive ion etching (RIE) have a number of

    Get Price
  • DESCRIPTION

    2018-1-4• Ensure that all application tools are clean and lint free. • DiamondCoat Tint. is designed to be used in conjunction with . DiamondCo Sealer Tint Baseat Refer to . DiamondCoat Sealer Tint Base. Technical Data Sheet for full application details. RE-COAT/CURE TIME • Recoat time: 4 hours. • Light foot traffic: 24 hours. • Full

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  • DESCRIPTION

    2018-1-4The Crommelin Moisture Meter is a multipurpose measuring tool, suitable for use on most cementitious construction materials and timber, that indicates substrate moisture content prior to over coating with membranes, sealers or paints. FEATURES AND BENEFITS • Multi-function concrete / masonry and timber modes .

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