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hitachi sulfur hexafluoride process

hitachi sulfur hexafluoride process

EP1766314A4 - Gas recovery of sulphur hexafluoride ...sulphur hexafluoride hexafluoride sulphur recovery Prior art date 2004-06-02 Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number EP05739999.0A Other languages German (de) French (fr)

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  • Sulfur hexafluoride purification from mixtures with air: a

    @article{osti_5854182, title = {Sulfur hexafluoride purification from mixtures with air: a process feasibility study}, author = {Perona, J. J. and Watson, J. S.}, abstractNote = {Studies were made of the purification of SF/sub 6/ vapor contaminated with air for application at the Holifield Heavy-Ion Research Facility. Liquefaction appears to be a good method for recovering about 90% of the SF

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  • Abatement of Sulfur Hexafluoride Emissions from the

    2018-11-12Abatement of Sulfur Hexafluoride Emissions from the Semiconductor Manufacturing Process by Atmospheric-Pressure Plasmas How Ming Lee, Moo Been Chang, and Kuan Yu Wu Graduate Institute of Environmental Engineering, National Central University, Taiwan ABSTRACT Sulfur hexafluoride (SF 6) is an important gas for plasma

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  • Modeling and Simulation of Sulfur Hexafluoride (SF

    2001-1-13Modeling and Simulation of Sulfur Hexafluoride (SF6) Purification Process 253 Korean J. Chem. Eng.(Vol. 17, No. 2) used in the purification experiment of SF6 mixture. The distilla-tion column with inside diameter of 108.3 mm was packed with IMPT (Intalox Metal Tower Packing) and consisted of three typi-cal sections with 1,200 mm spacing each.

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  • Abatement of Sulfur Hexafluoride Emissions from the

    2018-11-12Abstract Sulfur hexafluoride (SF6) is an important gas for plasma etching processes in the semiconductor industry. SF6 intensely absorbs infrared radiation and, consequently, aggravates global warming. This study investigates SF6 abatement by nonthermal plasma technologies under atmospheric pressure. Two kinds of nonthermal plasma processes—dielectric barrier discharge (DBD) and

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  • The SF6-ReUse-Process A contribution on the

    2018-7-3the operating process and are a normal ageing process of the gas. Operating-related contaminants may be eliminated by the operator on-site during maintenance work using service equipment fitted with the corresponding gas treatment systems, as described in Section 3.2.

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  • Hitachi Global

    2021-3-1Hitachi delivers digital solutions utilizing Lumada in five sectors including Mobility, Smart Life, Industry, Energy and IT, to increase our customers social, environmental and economic value.

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  • EP1766314A4 - Gas recovery of sulphur hexafluoride

    sulphur hexafluoride hexafluoride sulphur recovery Prior art date 2004-06-02 Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number EP05739999.0A Other languages German (de) French (fr)

    Get Price
  • US8828350B2 - Gas recovery of sulphur hexafluoride

    A system and method are provided for recovering a re-usable grade of sulphur hexafluoride (SF 6 ) from a potentially contaminated gas source. The system includes extraction vessels connected to the potentially contaminated gas source. A first cryogenic means reduces the temperature of the extraction vessel to a temperature below the phase transition of SF 6 causing a pressure differential

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  • Nitride open etch process based on trifluoromethane and

    9. The process of claim 4, wherein said flowing step flows between 1 and 100 sccm of sulfur hexafluoride, and between 10 and 200 sccm of trifluoromethane. 10. The process of claim 1, wherein said biasable pedestal is biased with between 50 to 400W of RF bias power

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